System on integrated chips and methods of forming the same

ABSTRACT

A semiconductor device and methods of forming are provided. The method includes bonding a second die to a surface of a first die. The method includes encapsulating the second die in an isolation material, and forming a through via extending through the isolation material. The method also includes forming a first passive device in the isolation material.

BACKGROUND

The semiconductor industry has experienced rapid growth due tocontinuous improvements in the integration density of a variety ofelectronic components (e.g., transistors, diodes, resistors, capacitors,etc.). For the most part, this improvement in integration density hascome from repeated reductions in minimum feature size (e.g., shrinkingthe semiconductor process node towards the sub-20 nm node), which allowsmore components to be integrated into a given area. As the demand forminiaturization, higher speed and greater bandwidth, as well as lowerpower consumption and latency has grown recently, there has grown a needfor smaller and more creative packaging techniques of semiconductordies.

As semiconductor technologies further advance, stacked semiconductordevices, e.g., 3D integrated circuits (3DIC), have emerged as aneffective alternative to further reduce the physical size of asemiconductor device. In a stacked semiconductor device, active circuitssuch as logic, memory, processor circuits and the like are fabricated ondifferent semiconductor wafers. Two or more semiconductor wafers may beinstalled on top of one another to further reduce the form factor of thesemiconductor device.

Two semiconductor wafers or dies may be bonded together through suitablebonding techniques. The commonly used bonding techniques include directbonding, chemically activated bonding, plasma activated bonding, anodicbonding, eutectic bonding, glass frit bonding, adhesive bonding,thermo-compressive bonding, reactive bonding and/or the like. Anelectrical connection may be provided between the stacked semiconductorwafers. The stacked semiconductor devices may provide a higher densitywith smaller form factors and allow for increased performance and lowerpower consumption.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a plan view of a semiconductor package in accordance with someembodiments.

FIGS. 2 through 5 are cross-sectional views of a semiconductor packagein accordance with some embodiments.

FIGS. 6A through 6F are cross-sectional views of a semiconductor packagein accordance with some embodiments.

FIGS. 7A through 7F are cross-sectional views of a semiconductor packagein accordance with some embodiments.

FIGS. 8 and 9 are cross-sectional views of a semiconductor package inaccordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the invention. Specificexamples of components and arrangements are described below to simplifythe present disclosure. These are, of course, merely examples and arenot intended to be limiting. For example, the formation of a firstfeature over or on a second feature in the description that follows mayinclude embodiments in which the first and second features are formed indirect contact, and may also include embodiments in which additionalfeatures may be formed between the first and second features, such thatthe first and second features may not be in direct contact. In addition,the present disclosure may repeat reference numerals and/or letters inthe various examples. This repetition is for the purpose of simplicityand clarity and does not in itself dictate a relationship between thevarious embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

System on integrated chip semiconductor packages having improved passivedevices, and methods of forming, are provided. Various embodimentsintegrate multiple functional chips in a single device package andimplement Chip-to-Wafer (e.g., known good die) for Chip-on-Wafer (CoW)level packaging. Functional chips may be directly bonded to otherfunctional chips (e.g., by hybrid bonding), for example in order toreduce the need to form solder bumps (e.g., microbumps) and underfill.In accordance with some embodiments, passive devices may be integratedin the package and formed in a same isolation material as one or morethrough vias and/or one or more dies. Passive devices formed in the sameisolation material as one or more through vias and/or one or more dies,as described herein, may result in passive devices with improvedperformance without significantly increasing a size of the semiconductorpackage.

Referring to FIG. 1, a plan view of a package 100 is shown.Semiconductor package 100 comprises first die 102A (shown in, e.g., FIG.2), second die 102B and third die 102C. Second die 102B and third die102C are disposed over underlying first die 102A, and each of second die102B and third die 102C is respectively bonded to first die 102A in aface-to face configuration. Each of second die 102B and third die 102Care encapsulated in isolation material 120. Each of second die 102B andthird die 102C may have one or more through die vias 140B and 140C.Through vias 160B extend through isolation material 120 and provideelectrical connections to underlying first die 102A.

Package 100 may include one or more passive devices in isolationmaterial 120. In the embodiment depicted in FIG. 1, package 100 includesinductors 204B and 204C, antenna 202B, coupler 200B, power combiner210B, and balun 206B. Fewer passive devices or additional passivedevices, or different combinations of passive devices or differentphysical configurations of passive devices, or different kinds ofpassive devices, may be included according to particular approaches anddesign requirements. Forming passive devices integrated in package 100in isolation material 120 as described herein may enable the formationof passive devices using thicker metal. For example, passive devicesformed in isolation material 120 may be formed using thicker metalcompared to passive devices formed in back end of the line interconnectstructures. As such, passive devices formed in isolation material 120,as described herein, may have improved performance. In some embodiments,forming passive devices in isolation material 120 may allow for theformation of passive devices having increased performance withoutrequiring a significant increase in the size of the package 100.

FIG. 1 depicts lines A-A′ through F-F′. These lines depict lines alongwhich later cross-sectional views will be depicted in subsequentFigures. FIGS. 2 through 5 and 8-9 are depicted along the line A-A′ ofFIG. 1.

FIGS. 2 through 5 are cross-sectional views of intermediate steps ofmanufacturing package 100. Referring to FIG. 2, first die 102A isprovided in a wafer form. First die 102A may be a known good die (KGD),for example, which may have passed various electrical and/or structuraltests. First die 102A may be a semiconductor die and could be any typeof integrated circuit, such as an application processor, logiccircuitry, memory, analog circuit, digital circuit, mixed signal, andthe like. First die 102A may include a substrate 104A and aninterconnect structure 106A over substrate 104A. Substrate 104A maycomprise, for example, bulk silicon, doped or undoped, or an activelayer of a semiconductor-on-insulator (SOI) substrate. Generally, an SOIsubstrate comprises a layer of a semiconductor material, such assilicon, formed on an insulator layer. The insulator layer may be, forexample, a buried oxide (BOX) layer or a silicon oxide layer. Theinsulator layer is provided on a substrate, such as a silicon or glasssubstrate. Alternatively, the substrate may include another elementarysemiconductor, such as germanium; a compound semiconductor includingsilicon carbide, gallium arsenic, gallium phosphide, indium phosphide,indium arsenide, and/or indium antimonide; an alloy semiconductorincluding SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; orcombinations thereof. Other substrates, such as multi-layered orgradient substrates, may also be used.

Active devices (not illustrated) such as transistors, capacitors,resistors, diodes, photo-diodes, fuses, and the like may be formed atthe top surface of substrate 104A. Interconnect structure 106A may beformed over the active devices and a front side of substrate 104A. Theterm “face” or “front” surface or side is a term used herein implyingthe major surface of the device upon which active devices andinterconnect layers are formed. Likewise, the “back” surface of a die isthat major surface opposite to the face or front.

The interconnect structure 106A may include inter-layer dielectric (ILD)and/or inter-metal dielectric (IMD) layers 108A containing conductivefeatures 110A (e.g., conductive lines and vias comprising copper,aluminum, tungsten, combinations thereof, and the like) formed using anysuitable method. The ILD and/or IMD layers 108A may include low-kdielectric materials having k values, for example, lower than about 4.0or even 2.0 disposed between such conductive features. In someembodiments, the ILD and/or IMD layers 108A may be made of, for example,phosphosilicate glass (PSG), borophosphosilicate glass (BPSG),fluorosilicate glass (FSG), SiO_(x)C_(y), Spin-On-Glass,Spin-On-Polymers, silicon carbon material, compounds thereof, compositesthereof, combinations thereof, or the like, formed by any suitablemethod, such as spinning, chemical vapor deposition (CVD), andplasma-enhanced CVD (PECVD). Interconnect structure 106A electricallyconnects various active devices to form functional circuits within firstdie 102A, and/or connects the various active devices to externaldevices. The functions provided by such functional circuits may includelogic structures, memory structures, processing structures, sensors,amplifiers, power distribution, input/output circuitry, or the like. Oneof ordinary skill in the art will appreciate that the above examples areprovided for illustrative purposes only to further explain applicationsof various embodiments and are non-limiting. Other circuitry may be usedas appropriate for a given application.

Additional features, such as input/output (I/O) contacts, passivationlayers, conductive pillars, and/or under bump metallurgy (UBM) layers,may also be optionally formed over interconnect structure 106A. Thevarious features of first die 102A may be formed by any suitable methodand are not described in further detail herein. Furthermore, the generalfeatures and configuration of first die 102A described above are but oneexample embodiment, and first die 102A may include any combination ofany number of the above features as well as other features.

In some embodiments, first die 102A may be placed on a carrier (notshown), which may provide temporary mechanical and structural supportfor various features (e.g., first die 102A) during subsequent processingsteps. In this manner, damage to the package 100 may be reduced orprevented. In other embodiments, first die 102A provides the temporarymechanical and structural support to other components of package 100during subsequent processing, and no carrier is needed.

Next, referring to FIG. 3, second die 102B and third die 102C are bondedto first die 102A. Second die 102B and third die 102C may each be bondedto first die 102A in a manner that the face sides (i.e. the sides of thedies containing interconnects 106 B/C) of second die 102B and third die102C are facing the face side of first die (i.e. the side containinginterconnect 106A) 102A, so that the dies are in a face-to-faceconfiguration.

Second die 102B and third die 102C may be similar to first die 102A, andlike numerals indicate like components of first die 102A, second die102B, and third die 102C. For example, second die 102B and third die102C may be a known good dies (KGDs), for example, which may have passedvarious electrical and/or structural tests. Second die 102B and thirddie 102C may be semiconductor dies and could be any type of integratedcircuits, such as application processors, logic circuitry, memory,analog circuits, digital circuits, mixed signals, and the like. Seconddie 102B and third die 102C may be similar types of dies or may bedifferent types of dies. Each of second die 102B and third die 102C mayinclude a substrate 104B/C and an interconnect structure 106B/C oversubstrate 104B/C. Substrates 104B/C may comprise, for example, bulksilicon, doped or undoped, or an active layer of asemiconductor-on-insulator (SOI) substrate. Alternatively, thesubstrates 104B/C may include another elementary semiconductor, such asgermanium; a compound semiconductor including silicon carbide, galliumarsenic, gallium phosphide, indium phosphide, indium arsenide, and/orindium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs,AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. Othersubstrates, such as multi-layered or gradient substrates, may also beused.

Active devices (not illustrated) such as transistors, capacitors,resistors, diodes, photo-diodes, fuses, and the like may be formed atthe top surfaces of substrates 104B/C. Interconnect structures 106B/Cmay be formed over the active devices and a front side of substrates104B/C. The interconnect structures may include inter-layer dielectric(ILD) and/or inter-metal dielectric (IMD) layers 108B/C containingconductive features 110B/C (e.g., conductive lines and vias comprisingcopper, aluminum, tungsten, combinations thereof, and the like) formedusing any suitable method. The ILD and/or IMD layers 108B/C may includelow-k dielectric materials having k values, for example, lower thanabout 4.0 or even 2.0 disposed between such conductive features. In someembodiments, the ILD and/or IMD layers 108B/C may be made of, forexample, phosphosilicate glass (PSG), borophosphosilicate glass (BPSG),fluorosilicate glass (FSG), SiO_(x)C_(y), Spin-On-Glass,Spin-On-Polymers, silicon carbon material, compounds thereof, compositesthereof, combinations thereof, or the like, formed by any suitablemethod, such as spinning, chemical vapor deposition (CVD), andplasma-enhanced CVD (PECVD).

Interconnect structures 106B/C electrically connect various activedevices to form functional circuits within second die 102B and third die102C, respectively, and may electrically connect the functional circuitsin second die 102B and third die 102C to external devices. The functionsprovided by such circuits may include logic structures, memorystructures, processing structures, sensors, amplifiers, powerdistribution, input/output circuitry, or the like. One of ordinary skillin the art will appreciate that the above examples are provided forillustrative purposes only to further explain applications of variousembodiments and are non-limiting. Other circuitry may be used asappropriate for a given application. Additional features, such asinput/output (I/O) contacts, passivation layers, conductive pillars,and/or under bump metallurgy (UBM) layers, may also be optionally formedover interconnect structures 106B/C.

In some embodiments, second die 102B and third die 102C are bonded tofirst die 102A using, for example, direct surface bonding,metal-to-metal bonding, hybrid bonding, or another bonding process. Insome embodiments, surfaces of first die 102A, second die 102B, and thirddie 102C that will be bonded undergo a cleaning and/or surfaceactivation process. Next, conductive features 110B of second die 102Band conductive features 110C of third die 102C may respectively bealigned and brought into contact with conductive features 110A of firstdie 102A, which also brings ILD and/or IMD 108B in second die 102B andILD and/or IMD 108C in third die 108C into contact with ILD and/or IMD108A in first die 102A. Second die 102B and third die 102C mayrespectively be bonded to first die 102A by applying pressure, heatand/or other bonding process steps to the joined surfaces, which mayfuse together the aligned conductive features 110A/110B and 110A/110C.The bonding process may also fuse together the surfaces of ILD and/orIMD 108A/108B and 108A/108C that are brought into physical contactduring the bonding. In some embodiments, the bonded dies are baked,annealed, pressed, or otherwise treated to strengthen or finalize thebond.

After the bonding, first die 102A may be electrically connected to eachof second die 102B and third die 102C. For example, active devices infirst die 102A may be connected to active devices in second die 102Band/or third die 102C. In some embodiments, second die 102B may beelectrically connected to third die 102C through conductive features infirst die 102A. For example, active devices in second die 102B may beelectrically connected to active devices in third die 102C throughconductive features in first die 102A.

Second die 102B and third die 102C may have initial thicknesses T1 ofabout 80 μm to about 200 μm, such as about 100 μm. Second die 102B andthird die 102C may also comprise through die vias 140B and 140C whichrespectively extend from interconnect structures 106 B/C at least partof the way through substrates 104B and 104C. Through die vias 140B and140C are formed to provide electrical connections between interconnectstructures 106 B/C and a far side of substrates 104B/C, and/or betweeninterconnect structure 106A and the far side of substrates 104B/C. Aswill be explained in detail below (see FIG. 5), in subsequent processingsecond die 102B and third die 102C will be thinned so that through dievias 140B/C will be exposed on back sides of second die 102B and thirddie 102C, allowing for backside electrical connections to be made tothrough die vias 104B/C.

Referring to FIG. 4, isolation material 120 is formed around second die102B and third die 102C. Isolation material 120 extends along sidewallsof second die 102B and third die 102C, and along a top surface of firstdie 102A. In a top down view (not shown), isolation material 120 mayencircle both second die 102B and third die 102C. Isolation material 120may comprise a dielectric material (e.g., an oxide, a nitride, or thelike), a polymer, a molding compound, or the like, a materialcomposition of which may be selected based on the final intendedthickness T2 of second die 102B and third die 102C (See FIG. 5).

In some embodiments, isolation material 120 may be selected according toa final thickness T2 of second die 102B and third die 102C (See FIG. 5).For example, a dielectric material may be used for isolation material120 when second die 102B and third die 102C are relatively thinner. Asanother example, a polymer material or even a molding compound may beused for a relatively thicker second die 102B and third die 102C inorder to provide improved structural support.

Referring to FIG. 5, after isolation material 120 is formed, aplanarization process (e.g., CMP, etch back, grinding, or the like) maybe applied. The grinding process may thin the thicknesses of second die102B and third die 102C and expose through die vias 140B and 140C. Athickness T2 of second die 102B and third die 102C after theplanarization process may be about 10 μm to about 50 μm, such as 20 μm.After the planarization process, top surfaces of isolation material 120,second die 102B, and third die 102C may be substantially planar.

In some embodiments, the planarization process may create metalresidues, such as metal particles, which are left on the top surfaces.Accordingly, after the grinding, a cleaning may be performed, forexample, through a wet etching, so that the metal residue is removed.

Next, as shown in FIGS. 6A through 6F, isolation material 120 ispatterned to create openings in which through vias and/or passivedevices will be formed. In some embodiments, openings may be formed inisolation material 120 using a combination of photolithography and/oretching.

FIG. 6A depicts package 100 along the line A-A′ depicted in the planview of FIG. 1. Along the line A-A′ isolation material 120 is patternedto create an opening 160A in which a through via 160B will be formed(see FIG. 7A). Isolation material 120 is also patterned to createopening 204A in which inductor 204B will be formed (see FIG. 7A).Although opening 204A appears as two different openings in thecross-section depicted in FIG. 6A, in a plan view openings 204A may be asingle continuous opening. Opening 160A, in which a through via 160Bwill be formed, may expose one or more conductive features 110A in firstdie 102A to which the through vias 160B will be electrically connected.Opening 204A may also expose one or more conductive features 110A infirst die 102A to which inductor 204B will be electrically connected.Openings 160A and 204A may be formed simultaneously, or may formed insuccessive etching and/or photolithography processes.

FIG. 6B depicts package 100 along the line B-B′ depicted in the planview of FIG. 1. Along the line B-B′ isolation material 120 is patternedto create a plurality of openings 160A in which through vias will beformed (see FIG. 7B). Isolation material 120 is also patterned to createan opening 202A in which a portion of antenna 202B will be formed (SeeFIG. 7B). Openings 160A, in which through vias 160B will be formed, mayexpose one or more conductive features 110A in first die 102A to whichthe through vias 160B will be electrically connected. Opening 202A mayalso expose one or more conductive features 110A in first die 102A towhich antenna 202B will be electrically connected. Openings 160A and202A may be formed simultaneously, or may formed in successive etchingand/or photolithography processes.

FIG. 6C depicts package 100 along the line C-C′ of the plan view ofFIG. 1. Along the line C-C′ isolation material 120 is patterned tocreate an opening 160A in which a through via will be formed (see FIG.7C). Isolation material 120 is also patterned to create an opening 200Ain which coupler 200B will be formed (See FIG. 7C). Although opening200A appears as two different openings in the cross-section depicted inFIG. 6C, in a plan view opening 200A may be a single continuous opening.Opening 160A, in which a through via 106B will be formed, may expose aconductive feature 110A in first die 102A. Opening 200A may also exposeone or more conductive features 110A in first die 102A to which coupler200B will be electrically connected. Openings 160A and 200A may beformed simultaneously, or may formed in successive etching and/orphotolithography processes.

FIG. 6D depicts package 100 along the line D-D′ of the plan view ofFIG. 1. Along the line D-D′ isolation material 120 is patterned tocreate a plurality of openings 160A in which a plurality of through viaswill be formed (see FIG. 7D). Isolation material 120 is also patternedto create opening 210A in which power combiner 210B will be formed (SeeFIG. 7D). Although opening 210A appears as two different openings in thecross-section depicted in FIG. 6D, in a plan view opening 210A may be asingle continuous opening. Openings 160A, in which a plurality ofthrough vias 106B will be formed, may each expose one or more conductivefeatures 110A in first die 102A to which the through vias will beelectrically connected. Opening 210A may expose one or more conductivefeature 110A in first die 102A to which power combiner 210B will beelectrically connected. Openings 160A and 210A may be formedsimultaneously, or may formed in successive etching and/orphotolithography processes.

FIGS. 6E and 6F depict package 100 along the lines E-E′ (FIG. 6E) andF-F′ (FIG. 6F) of the plan view of FIG. 1. Along the lines E-E′ and F-F′isolation material 120 is patterned to create a plurality of openings160A in which a plurality of through vias will be formed (see FIGS. 7Eand 7F). Isolation material 120 is also patterned to create openings210A in which power combiner 210B, discussed above, will be formed, andto create openings 206A in which balun 206B will be formed. Openings160A, in which a plurality of through vias 106B will be formed, may eachexpose one or more conductive features 110A in first die 102A to whichthe through vias 160B will be electrically connected. Openings 206A mayexpose conductive feature 110A in first die 102A to which balun 206Bwill be electrically connected. Openings 160A, 210A and 206A may beformed simultaneously, or may formed in successive etching and/orphotolithography processes.

After isolation material 120 is patterned, a conductive material may bedeposited in the openings (e.g., using electroless plating,electrochemical plating, or the like). In some embodiments, theconductive material may overfill the openings, and a planarizationprocess (e.g., CMP) may be applied to remove excess conductive materialand form through vias and passive devices. The resulting structure isdepicted in FIGS. 7A through 7F. For example, FIG. 7A depicts line A-A′of FIG. 1 after through vias 160B and an inductor 204B have been formedin isolation material 120. Inductor 204B and through via 160B areelectrically connected to interconnect structure 106A using conductivefeatures 110A. FIG. 7B depicts line B-B′ of FIG. 1 after through vias160B and an antenna 202B have been formed in isolation material 120.Antenna 202B and through vias 160B are electrically connected tointerconnect structure 106A using conductive features 110A. FIG. 7Cdepicts line C-C′ of FIG. 1 after through vias 160B and coupler 200Bhave been formed in isolation material 120. Coupler 200B and through via160B are electrically connected to interconnect structure 106A usingconductive features 110A. FIG. 7D depicts line D-D′ of FIG. 1 afterthrough vias 160B and power combiner 210B have been formed in isolationmaterial 120. Power combiner 210B and through vias 160B are electricallyconnected to interconnect structure 106A using conductive features 110A.FIGS. 7E and 7F depict lines E-E′ and F-F′ of FIG. 1 after through vias160B and balun 206B have been formed in isolation material 120. Balun206B and through vias 160B are electrically connected to interconnectstructure 106A using conductive features 110A. A thickness T3 of eachpassive device may be about 10 μm to about 50 μm, such as 20 μm. Thethickness of each passive device may be substantially the same as athickness of the through vias 160B and a thickness of second die 102Band third die 102C.

FIGS. 3 through 7F depict embodiments in which an isolation material 120is formed, openings are etched in isolation material 120, and thenpassive devices (antenna 202B, inductor 204B, balun 206B, coupler 208B,and/or power combiner 210B) through vias 160B are formed in theopenings. In other embodiments, the passive devices (antenna 202B,inductor 204B, balun 206B, coupler 208B, and/or power combiner 210B) andthrough vias 160B may be formed before second die 102A and third die102C are bonded to first die 102A and isolation material 120 is formed.For example, a conductive seed layer (not shown) may be deposited overfirst die 102A, e.g. as shown in FIG. 2, on a surface of ILD and/or IMD108A on which passive devices (antenna 202B, inductor 204B, balun 206B,coupler 208B, and/or power combiner 210B) and/or through vias 160B willbe formed. In some embodiments, the seed layer is a metal layer, whichmay be a single layer or a composite layer comprising a plurality ofsub-layers formed of different materials. The seed layer may be made ofcopper, titanium, nickel, gold, or a combination thereof, or the like.In some embodiments, the seed layer comprises a titanium layer and acopper layer over the titanium layer. The seed layer may be formedusing, for example, physical vapor deposition (PVD), CVD, atomic layerdeposition (ALD), a combination thereof, or the like. In someembodiments, the seed layer comprises titanium layer and a copper layerover the titanium layer. In alternative embodiments, the seed layer is acopper layer.

Next, a mask layer, such as a patterned photoresist layer (not shown),may be deposited and patterned, wherein openings in the mask layerexpose the seed layer. The openings in the mask layer may be filled witha conductive material using, for example, an electroless plating processor an electrochemical plating process, thereby creating passive devices(antenna 202B, inductor 204B, balun 206B, coupler 208B, and/or powercombiner 210B) and through vias 160B. The plating process mayuni-directionally fill openings (e.g., from the seed layer upwards) inthe patterned photoresist layer. Uni-directional filling may allow formore uniform filling of such openings. Alternatively, another seed layermay be formed on sidewalls of the openings in the patterned photoresistlayer, and such openings may be filled multi-directionally. Next, themask layer may be removed, for example in an ashing and/or wet stripprocess, and an etch step is performed to remove the exposed portions ofthe seed layer, wherein the etching may be an anisotropic etching. Theportions of the seed layer that are overlapped by a passive device(antenna 202B, inductor 204B, balun 206B, coupler 208B, and/or powercombiner 210B) or a through via 160B, on the other hand, remain notetched. Next, second die 102A and third die 102C are bonded to first die102A, using the same or similar methods described above in connectionwith FIG. 3. Next, isolation material 120 is formed along sidewalls ofthe passive devices (antenna 202B, inductor 204B, balun 206B, coupler208B, and power combiner 210B) and through vias 160B using the same orsimilar processes described above in connection with FIG. 4. In someembodiments, after the isolation material 120 is formed excess isolationmaterial 120 will be present on a top surface of the package 100. Agrinding process may be performed to planarize the top surfaces ofisolation material 120 and to expose the passive devices (antenna 202B,inductor 204B, balun 206B, coupler 208B, and power combiner 210B) andthrough vias 160B through the isolation material. The resultingstructure is the same as or similar to the structure depicted in FIGS.7A-F.

In FIG. 8, fan-out redistribution layers (RDLs) 126 may be formed overisolation material 120, second die 102B and third die 102C. Generally,RDLs 126 provide a conductive pattern that allows a pin-out contactpattern for a completed package different than the pattern of throughvias 33 and/or metal pillars 40, allowing for greater flexibility in theplacement of through vias 160B, second die 102B and third die 102C. TheRDLs 126 may be utilized to provide an external electrical connection tofirst die 102A, second die 102B and/or third die 102C and/or to throughvias 160B. The RDLs 126 may further be used to electrically couple firstdie 102A, second die 102B and/or third die 102C to through vias 160B,which may be electrically coupled to one or more other packages, packagesubstrates, components, the like, or a combination thereof. The RDLs 126comprise conductive features 128 which include conductive lines 128A andvias 128B, wherein vias 128B connect an overlying line (e.g., anoverlying conductive lines 128A) to an underlying conductive feature(e.g., through vias 160B, through die vias 140B/C, and/or conductivelines 128A). Conductive lines 128A may extend along any direction. RDLs126 may extend laterally past edges of first die 102A over a top surfaceof isolation material 120. Conductive features 128 may be formed in oneor more polymer layers 130. Polymer layers 130 may be formed of anysuitable material (e.g., polyimide (PI), polybenzoxazole (PBO),benzocyclobuten (BCB), epoxy, silicone, acrylates, nano-filled phenoresin, siloxane, a fluorinated polymer, polynorbornene, and the like)using any suitable method, such as, a spin-on coating technique,lamination, and the like.

Conductive features 128 (e.g., conductive lines 128A and/or vias 128B)may be formed in polymer layers 130 and electrically connect to seconddie 102B and third die 102C as well as interconnect structure 106A offirst die 102A (e.g., using through vias 160B). The formation ofconductive features 128 may include patterning polymer layers 130 (e.g.,using a combination of photolithography and/or etching processes) andforming conductive features over and in the patterned polymer layer. Forexample, conductive features 128 may further include depositing a seedlayer (not shown), using a mask layer (not shown) having variousopenings to define the shape of conductive features 128, and filling theopenings in the mask layer using an electro-chemical plating process,for example. The mask layer and excess portions of the seed layer maythen be removed. Another polymer layer may be formed over the conductivefeatures that have been formed, for example to electrically isolate theconductive feature and to provide a more planar surface for subsequentprocessing. The number of polymer layers and conductive features of RDLs126 is not limited to the illustrated embodiment of FIG. 8. For example,RDLs 126 may include any number of stacked, electrically connectedconductive features in multiple polymer layers.

As further illustrated by FIG. 8, additional I/O features are formedover RDLs 126. For example, external connectors 132 (e.g., BGA balls, C4bumps, and the like) may be formed over RDLs 126. Connectors 132 may bedisposed on UBMs 134, which may also be formed over RDLs 126. Connectors132 may be electrically connected to first die 102A, second die 102B,and third die 102C by RDLs 126. Connectors 132 may be used toelectrically connect package 100 to other package components such asanother device die, interposers, package substrates, printed circuitboards, a mother board, and the like.

There are many possible different electrical connections that may beformed in package 100 according to a particular design or approach. Forexample, a connector 132 may be electrically connected to a passivedevice (such as antenna 202B, inductor 204B, balun 206B, coupler 208B,and/or power combiner 210B), and the passive device may in turn beelectrically connected to second die 102B and/or third die 102C. Aconnector 132 may be electrically connected to a passive device (such asantenna 202B, inductor 204B, balun 206B, coupler 208B, and/or powercombiner 210B), and the passive device may in turn be electricallyconnected to first die 102A. A connector 132 may be electricallyconnected to first die 102A, and first die 102A may in turn beelectrically connected to a passive device, such as antenna 202B,inductor 204B, balun 206B, coupler 208B, and/or power combiner 210B. Aconnector 132 may be electrically connected to second die 102B or thirddie 102C, which may in turn be electrically connected to first die 102A,and first die 102A may in turn be electrically connected to a passivedevice, such as antenna 202B, inductor 204B, balun 206B, coupler 208B,and/or power combiner 210B. As a final example, a connector 132 may beelectrically connected to a through via in second die 102B or a throughvia in third die 102C, which may in turn be electrically connected tofirst die 102A, which may in turn be electrically connected to a passivedevice, such as antenna 202B, inductor 204B, balun 206B, coupler 208B,and/or power combiner 210B.

Next, as illustrated in FIG. 9, an orientation of package 100 may bereversed. In the reversed orientation, connectors 132 may be attached toa temporary support frame 136 (e.g., comprising a support tape).

As described herein, a semiconductor package may for formed whereinfunctional chips are directly bonded to other functional chips, andthrough vias may extend through isolation material encapsulating one ormore of the functional chips. Passive devices may be integrated in thepackage and formed in the same isolation material in which the throughvias and/or functional chips are formed. Passive devices may be formedusing thicker metal than if the passive devices were formed in a backend of the line interconnect structure. Passive devices formed in thesame isolation material as through vias and/or functional chips, asdescribed herein, may have improved performance without requiring asignificant increase in the size of the package 100.

A method is provided in accordance with some embodiments. The methodincludes bonding a second die to a surface of a first die. The methodalso includes encapsulating the second die in an isolation material. Themethod also includes forming a through via extending through theisolation material. The method also includes forming a first passivedevice in the isolation material.

A method is provided in accordance with some embodiments. The methodincludes aligning contacts of a second die to first contacts of a firstdie, and aligning contacts of a third die to second contacts of thefirst die. The method also includes bonding the second die to the firstdie using the first contacts of the first die, and bonding the third dieto the first die using the second contacts of the first die. The methodalso includes encapsulating the second die and the third die in adielectric material. The method also includes forming a first openingand a second opening in the dielectric material. The method alsoincludes filling the first opening and the second opening with aconductive material to form a through via in the first opening and afirst passive device in the second opening.

A device is provided in accordance with some embodiments. The deviceincludes a second die bonded to a first die and a third die bonded tothe first die. The device also includes an isolation material extendingalong sidewalls of the second die and the third die. A through viaextends from the first die into the isolation material. A passive deviceis disposed in the isolation material, where the passive device iselectrically connected to the first die.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A method, comprising: bonding a second die to a surface of a firstdie; encapsulating the second die in an isolation material; forming athrough via extending through the isolation material; and forming afirst passive device in the isolation material, the first passive deviceoverlying the first die and extending along a sidewall of the seconddie.
 2. The method according to claim 1, wherein the first passivedevice is electrically connected to a conductive feature of the firstdie.
 3. The method according to claim 1, wherein bonding the second dieto the surface of the first die comprises hybrid bonding the second dieto the surface of the first die.
 4. The method according to claim 1,further comprising performing a planarization process on the second dieafter encapsulating the second die in the isolation material.
 5. Themethod according to claim 4, wherein the planarization process exposes athrough die via in the second die.
 6. The method according to claim 1,further comprising: bonding a third die to the first die; andencapsulating the third die in the isolation material.
 7. The methodaccording to claim 1, wherein the first die comprises an interconnectstructure over a substrate, and wherein the first passive device iselectrically connected to a conductive line in the interconnectstructure.
 8. The method according to claim 1, wherein the through viaand the first passive device are simultaneously formed.
 9. The methodaccording to claim 8, wherein simultaneously forming the first passivedevice and the through via comprises: forming a plurality of openings inthe isolation material; and performing an electroplating process todeposit a conductive material in the plurality of openings; andperforming a planarization process, wherein after the planarizationprocess the first passive device and the through via are formed.
 10. Themethod according to claim 1, wherein forming the through via and formingthe first passive device comprises: performing a first etch to form afirst opening; performing a second etch to form a second opening,wherein the second etch is performed after the first etch has beencompleted; and performing an electroplating process to form the throughvia in the first opening and the first passive device in the secondopening, or performing an electroplating process to form the firstpassive device in the first opening and the through via in the secondopening.
 11. The method according to claim 1, wherein the first passivedevice comprises an inductor, an antenna, a power combiner, a coupler,or a balun.
 12. The method according to claim 1, further comprising:forming a second passive device; and encapsulating the second passivedevice in the isolation material; wherein the first passive device andthe second passive device are simultaneously formed.
 13. A method,comprising: aligning contacts of a second die to first contacts of afirst die; aligning contacts of a third die to second contacts of thefirst die; bonding the second die to the first die using the firstcontacts of the first die; bonding the third die to the first die usingthe second contacts of the first die; encapsulating the second die andthe third die in a dielectric material; forming a first opening and asecond opening in the dielectric material; and filling the first openingand the second opening with a conductive material to form a through viain the first opening and a first passive device in the second opening.14. The method according to claim 13, wherein the first opening and thesecond opening are simultaneously formed.
 15. The method according toclaim 13, wherein the first opening and the second opening aresequentially formed.
 16. The method according to claim 13, furthercomprising: forming a third opening in the dielectric material; andfilling the third opening with the conductive material to form a secondpassive device in the third opening.
 17. The method according to claim16, wherein the first opening, the second opening, and the third openingare simultaneously formed.
 18. The method according to claim 16, whereinthe first passive device and the second passive device are selected fromthe group consisting of: an inductor, an antenna, a power combiner, acoupler, and a balun. 19-20. (canceled)
 21. A method, comprising:bonding a first surface of a first die to a second die; bonding thefirst surface of the first die to a third die; forming an isolationmaterial along sidewalls of the third die and sidewalls of the seconddie, wherein a sidewall of the isolation material is aligned with asidewall of the first die; forming a first opening and a second openingin the isolation material, wherein a first contact of the first die isexposed by the first opening and a second contact of the first die isexposed by the second opening; and simultaneously filling the firstopening and the second opening with a conductive material to form afirst passive device in the first opening and a second passive device inthe second opening, the first passive device being electricallyconnected to the first contact and the second passivation device beingelectrically connected to the second contact.
 22. The method accordingto claim 21, further comprising forming a through via extending throughthe isolation material between a first surface of the isolation materialand the first surface of the first die, wherein the first surface of theisolation material is level with a surface of the second die that isfarthest from the first die.